{"id":476402,"date":"2025-03-29T08:38:55","date_gmt":"2025-03-29T07:38:55","guid":{"rendered":"https:\/\/www.ecinews.fr\/?p=476402"},"modified":"2025-03-28T15:50:13","modified_gmt":"2025-03-28T14:50:13","slug":"la-chine-developpe-un-systeme-de-lithographie-duv-solid-state","status":"publish","type":"post","link":"https:\/\/www.ecinews.fr\/fr\/la-chine-developpe-un-systeme-de-lithographie-duv-solid-state\/","title":{"rendered":"La Chine d\u00e9veloppe un syst\u00e8me de lithographie DUV solid state"},"content":{"rendered":"<p>Des chercheurs chinois ont publi\u00e9 les d\u00e9tails d&rsquo;un syst\u00e8me de lithographie par UV profond (DUV) qui pourrait aider le pays \u00e0 d\u00e9velopper des puces haute performance de g\u00e9om\u00e9trie avanc\u00e9e de 7nm \u00e0 3nm.<\/p>\n<p>La Chine est soumise \u00e0 des contr\u00f4les \u00e0 l&rsquo;exportation sur les syst\u00e8mes de lithographie de pointe utilisant des UV extr\u00eames (EUV) et certains syst\u00e8mes DUV et travaille sur ces technologies depuis plus d&rsquo;une d\u00e9cennie. Huawei testerait un syst\u00e8me EUV dans le courant de l&rsquo;ann\u00e9e.<\/p>\n<ul>\n<li><a href=\"https:\/\/www.eenewseurope.com\/en\/china-developed-euv-lithography-could-trial-in-2025\/\">Le syst\u00e8me chinois de lithographie EUV pourrait \u00eatre test\u00e9 en 2025<\/a><\/li>\n<li><a href=\"https:\/\/www.eenewseurope.com\/en\/asml-sees-export-controls-on-latest-duv-lithography-equipment\/\">ASML envisage des contr\u00f4les \u00e0 l&rsquo;exportation pour son dernier \u00e9quipement de lithographie DUV<\/a><\/li>\n<\/ul>\n<p>Le syst\u00e8me DUV d\u00e9velopp\u00e9 par l&rsquo;\u00e9quipe de l&rsquo;Acad\u00e9mie chinoise des sciences, fonctionne \u00e0 193nm et utilise un syst\u00e8me compact de laser puls\u00e9 nanoseconde \u00e0 l&rsquo;\u00e9tat solide avec un taux de r\u00e9p\u00e9tition de 6 kHz qui correspond \u00e0 une \u00e9nergie d&rsquo;impulsion de plus de 10 \u03bcJ.<\/p>\n<p>Une partie du laser de 1030 nm provenant de l&rsquo;amplificateur \u00e0 cristal Yb:YAG fait maison est divis\u00e9e pour g\u00e9n\u00e9rer un laser de 258 nm (1,2 W) par g\u00e9n\u00e9ration de quatri\u00e8me harmonique, et le reste est utilis\u00e9 pour pomper un amplificateur param\u00e9trique optique produisant un laser de 1553 nm (700 mW).<\/p>\n<p><img decoding=\"async\" class=\"alignnone wp-image-475911 lazyload\" data-src=\"https:\/\/www.eenewseurope.com\/wp-content\/uploads\/2025\/03\/China-DUV-lithography.png\" alt=\"\" width=\"450\" height=\"206\" data-srcset=\"https:\/\/www.ecinews.fr\/wp-content\/uploads\/2025\/03\/China-DUV-lithography.png 993w, https:\/\/www.ecinews.fr\/wp-content\/uploads\/2025\/03\/China-DUV-lithography-300x137.png 300w, https:\/\/www.ecinews.fr\/wp-content\/uploads\/2025\/03\/China-DUV-lithography-768x351.png 768w\" data-sizes=\"(max-width: 450px) 100vw, 450px\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" style=\"--smush-placeholder-width: 450px; --smush-placeholder-aspect-ratio: 450\/206;\" \/><\/p>\n<p>Le m\u00e9lange de fr\u00e9quence de ces faisceaux dans des cristaux LiB3O5 en cascade permet d&rsquo;obtenir un laser de 193 nm d&rsquo;une puissance moyenne de 70 mW et d&rsquo;une largeur de ligne inf\u00e9rieure \u00e0 880 MHz. Cette caract\u00e9ristique est essentielle pour produire les tailles de caract\u00e9ristiques sur le silicium \u00e0 7 nm avec des optiques \u00e0 immersion, et peut \u00eatre utilis\u00e9e jusqu&rsquo;\u00e0 des n\u0153uds de processus de 3 nm.<\/p>\n<p>Le syst\u00e8me utilise une nouvelle technique, un faisceau laser vortex, qui, selon l&rsquo;\u00e9quipe, est le premier \u00e0 193 nm.<\/p>\n<p>Il introduit une lame de phase en spirale dans le faisceau de 1553 nm avant le m\u00e9lange des fr\u00e9quences pour g\u00e9n\u00e9rer un faisceau tourbillonnaire porteur d&rsquo;un moment angulaire orbital. Ce faisceau pourrait \u00eatre utilis\u00e9 pour alimenter les lasers \u00e0 excim\u00e8re ArF qui sont utilis\u00e9s dans les syst\u00e8mes de lithographie DUV et a donc des applications potentielles dans le traitement des plaquettes de silicium et l&rsquo;inspection des d\u00e9fauts.<\/p>\n<p><a href=\"https:\/\/www.spiedigitallibrary.org\/journals\/advanced-photonics-nexus\/volume-4\/issue-02\/026011\/Compact-narrow-linewidth-solid-state-193-nm-pulsed-laser-source\/10.1117\/1.APN.4.2.026011.full\">www.spiedigitallibrary.org\/journals\/advanced-photonics-nexus<\/a><\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Des chercheurs chinois ont publi\u00e9 les d\u00e9tails d&rsquo;un syst\u00e8me de lithographie par UV profond (DUV) qui pourrait aider le pays \u00e0 d\u00e9velopper des puces haute performance de g\u00e9om\u00e9trie avanc\u00e9e de 7nm \u00e0 3nm. La Chine est soumise \u00e0 des contr\u00f4les \u00e0 l&rsquo;exportation sur les syst\u00e8mes de lithographie de pointe utilisant des UV extr\u00eames (EUV) et [&hellip;]<\/p>\n","protected":false},"author":40,"featured_media":475914,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[883],"tags":[3018,3104,6384],"domains":[47],"ppma_author":[3640,6199],"class_list":["post-476402","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-technologies","tag-duv","tag-lithographie","tag-semi-conducteurs","domains-electronique-eci"],"acf":[],"yoast_head":"<title>La Chine d\u00e9veloppe un syst\u00e8me de lithographie DUV solid state ...<\/title>\n<meta name=\"description\" content=\"Des chercheurs chinois ont publi\u00e9 les d\u00e9tails d&#039;un syst\u00e8me de lithographie DUV qui pourrait aider le pays \u00e0 d\u00e9velopper des puces 7nm.\" 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