{"id":434554,"date":"2023-10-16T17:33:00","date_gmt":"2023-10-16T15:33:00","guid":{"rendered":"https:\/\/www.eenewseurope.com\/?p=434554"},"modified":"2023-10-16T17:35:11","modified_gmt":"2023-10-16T15:35:11","slug":"canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm","status":"publish","type":"post","link":"https:\/\/www.ecinews.fr\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/","title":{"rendered":"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm"},"content":{"rendered":"<h3>Canon a lanc\u00e9 un syst\u00e8me de lithographie pour les process \u00e0 5 nm utilisant la technologie de la nanoimpression qui, selon elle, peut \u00eatre utilis\u00e9e jusqu&rsquo;\u00e0 2 nm.<\/h3>\n<p>La technologie de lithographie par nanoimpression (NIL), mise au point par EVG en Europe et Toppan au Japon, consiste \u00e0 presser sur le wafer de silicium, \u00e0 la mani\u00e8re d&rsquo;un timbre, un masque de 6 pouces sur lequel est imprim\u00e9 le motif du circuit sur la r\u00e9sine.<\/p>\n<p>Comme le process de transfert des sch\u00e9mas de circuit ne passe pas par un m\u00e9canisme optique, les sch\u00e9mas de circuit fins sur le masque peuvent \u00eatre reproduits fid\u00e8lement sur le wafer de silicium. Cela permet de former des circuits complexes en deux ou trois dimensions en une seule empreinte, ce qui peut r\u00e9duire le co\u00fbt du modelage d&rsquo;un wafer de silicium.<\/p>\n<p>La technique de la nanoimpression permet \u00e9galement d&rsquo;\u00e9viter le recours \u00e0 des sources de lumi\u00e8re ultraviolette extr\u00eame (EUV) et \u00e0 des optiques complexes qui font grimper le co\u00fbt des syst\u00e8mes de lithographie \u00e0 2 nm du concurrent n\u00e9erlandais ASML \u00e0 plusieurs millions de dollars. Cela permet \u00e9galement de r\u00e9duire les besoins en \u00e9nergie d&rsquo;une usine de fabrication de wafers de silicium.<\/p>\n<ul>\n<li><a href=\"https:\/\/www.eenewseurope.com\/en\/ev-toppan-team-for-nanoimprint-photonics-lithography\/\">EVG et Toppan s&rsquo;associent pour la lithographie photonique par nanoimpression <\/a><\/li>\n<li><a href=\"https:\/\/www.eenewseurope.com\/en\/toppan-spins-out-its-semiconductor-mask-business-ahead-of-an-ipo\/\">Toppan c\u00e8de ses activit\u00e9s dans le domaine des masques pour semi-conducteurs<\/a><\/li>\n<\/ul>\n<p>Le syst\u00e8me NIL FPA-1200NZ2C de Canon pour les wafers de 300 mm permet de cr\u00e9er des motifs avec une largeur de ligne minimale de 14 nm, ce qui \u00e9quivaut au n\u0153ud de 5 nm requis pour produire les semiconducteurs logiques les plus avanc\u00e9s. La poursuite de l&rsquo;am\u00e9lioration de la technologie des masques permettra \u00e0 la technologie NIL d&rsquo;atteindre une largeur de ligne minimale de 10 nm, selon Canon, ce qui correspond au n\u0153ud de 2 nm.<\/p>\n<p>Le syst\u00e8me de lithographie NIL utilise \u00e9galement une nouvelle technologie de contr\u00f4le de l&rsquo;environnement qui supprime la contamination par les particules fines dans l&rsquo;\u00e9quipement.<\/p>\n<p>Cela permet un alignement de haute pr\u00e9cision, n\u00e9cessaire \u00e0 la fabrication de semiconducteurs avec un nombre croissant de couches et \u00e0 la r\u00e9duction des d\u00e9fauts dus aux particules fines, et permet la formation de circuits fins et complexes.<\/p>\n<ul>\n<li><a href=\"https:\/\/www.eenewseurope.com\/en\/deal-creates-first-nanoimprint-lithography-system-with-inkjet-coating\/\">Deal cr\u00e9e le premier syst\u00e8me de lithographie par nanoimpression avec impression \u00e0 jet d&rsquo;encre <\/a><\/li>\n<li><a href=\"https:\/\/www.eenewseurope.com\/en\/intel-spins-out-4-3bn-chip-mask-making-business-in-europe\/\">Intel externalise son activit\u00e9 de fabrication de masques pour puces pour un montant de 4,3 milliards de dollars<\/a><\/li>\n<\/ul>\n<p>Outre les puces en silicium de pointe, les syst\u00e8mes de lithographie NIL peuvent \u00eatre utilis\u00e9s pour d&rsquo;autres applications telles que les m\u00e9ta-lentilles pour l&rsquo;optique de la r\u00e9alit\u00e9 mixte, qui n\u00e9cessitent des microstructures de dizaines de nanom\u00e8tres.<\/p>\n<p><a href=\"http:\/\/www.canon.com\">www.canon.com<\/a><\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Canon a lanc\u00e9 un syst\u00e8me de lithographie pour les process \u00e0 5 nm utilisant la technologie de la nanoimpression qui, selon elle, peut \u00eatre utilis\u00e9e jusqu&rsquo;\u00e0 2 nm. La technologie de lithographie par nanoimpression (NIL), mise au point par EVG en Europe et Toppan au Japon, consiste \u00e0 presser sur le wafer de silicium, \u00e0 [&hellip;]<\/p>\n","protected":false},"author":34,"featured_media":434540,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[883],"tags":[2159,4896,2934],"domains":[47],"ppma_author":[3640,1153],"class_list":["post-434554","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-technologies","tag-2nm","tag-5nm","tag-euv","domains-electronique-eci"],"acf":[],"yoast_head":"<title>Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm ...<\/title>\n<meta name=\"description\" content=\"Canon a lanc\u00e9 un syst\u00e8me de lithographie pour 5 nm utilisant la technologie de la nanoimpression qui peut \u00eatre utilis\u00e9e jusqu&#039;\u00e0 2 nm.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/posts\/434554\/\" \/>\n<meta property=\"og:locale\" content=\"fr_FR\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm\" \/>\n<meta property=\"og:description\" content=\"Canon a lanc\u00e9 un syst\u00e8me de lithographie pour 5 nm utilisant la technologie de la nanoimpression qui peut \u00eatre utilis\u00e9e jusqu&#039;\u00e0 2 nm.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/posts\/434554\/\" \/>\n<meta property=\"og:site_name\" content=\"EENewsEurope\" \/>\n<meta property=\"article:published_time\" content=\"2023-10-16T15:33:00+00:00\" \/>\n<meta property=\"article:modified_time\" content=\"2023-10-16T15:35:11+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.eenewseurope.com\/wp-content\/uploads\/2023\/10\/Canon-1200nz2c-2.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"600\" \/>\n\t<meta property=\"og:image:height\" content=\"450\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"author\" content=\"Nick Flaherty, A Delapalisse\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"A Delapalisse\" \/>\n\t<meta name=\"twitter:label2\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data2\" content=\"2 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/#article\",\"isPartOf\":{\"@id\":\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/\"},\"author\":{\"name\":\"A Delapalisse\",\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#\/schema\/person\/0aa2cfb0bd8949724a68cbac8d8321b4\"},\"headline\":\"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm\",\"datePublished\":\"2023-10-16T15:33:00+00:00\",\"dateModified\":\"2023-10-16T15:35:11+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/\"},\"wordCount\":468,\"publisher\":{\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#organization\"},\"keywords\":[\"2nm\",\"5nm\",\"EUV\"],\"articleSection\":[\"Technologies\"],\"inLanguage\":\"fr-FR\"},{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/\",\"url\":\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/\",\"name\":\"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm -\",\"isPartOf\":{\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#website\"},\"datePublished\":\"2023-10-16T15:33:00+00:00\",\"dateModified\":\"2023-10-16T15:35:11+00:00\",\"description\":\"Canon a lanc\u00e9 un syst\u00e8me de lithographie pour 5 nm utilisant la technologie de la nanoimpression qui peut \u00eatre utilis\u00e9e jusqu'\u00e0 2 nm.\",\"breadcrumb\":{\"@id\":\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/#breadcrumb\"},\"inLanguage\":\"fr-FR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/www.ecinews.fr\/fr\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#website\",\"url\":\"https:\/\/www.ecinews.fr\/fr\/\",\"name\":\"EENewsEurope\",\"description\":\"Just another WordPress site\",\"publisher\":{\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.ecinews.fr\/fr\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"fr-FR\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#organization\",\"name\":\"EENewsEurope\",\"url\":\"https:\/\/www.ecinews.fr\/fr\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"fr-FR\",\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.ecinews.fr\/wp-content\/uploads\/2022\/02\/logo-1.jpg\",\"contentUrl\":\"https:\/\/www.ecinews.fr\/wp-content\/uploads\/2022\/02\/logo-1.jpg\",\"width\":283,\"height\":113,\"caption\":\"EENewsEurope\"},\"image\":{\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#\/schema\/logo\/image\/\"}},{\"@type\":\"Person\",\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#\/schema\/person\/0aa2cfb0bd8949724a68cbac8d8321b4\",\"name\":\"A Delapalisse\",\"image\":{\"@type\":\"ImageObject\",\"inLanguage\":\"fr-FR\",\"@id\":\"https:\/\/www.ecinews.fr\/fr\/#\/schema\/person\/image\/211ac42237c2e9683c0964086c393cb4\",\"url\":\"https:\/\/secure.gravatar.com\/avatar\/ad45a8c5da24bc9c7c4940dd1c48a695?s=96&d=mm&r=g\",\"contentUrl\":\"https:\/\/secure.gravatar.com\/avatar\/ad45a8c5da24bc9c7c4940dd1c48a695?s=96&d=mm&r=g\",\"caption\":\"A Delapalisse\"},\"sameAs\":[\"http:\/\/ECI\"]}]}<\/script>","yoast_head_json":{"title":"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm ...","description":"Canon a lanc\u00e9 un syst\u00e8me de lithographie pour 5 nm utilisant la technologie de la nanoimpression qui peut \u00eatre utilis\u00e9e jusqu'\u00e0 2 nm.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/posts\/434554\/","og_locale":"fr_FR","og_type":"article","og_title":"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm","og_description":"Canon a lanc\u00e9 un syst\u00e8me de lithographie pour 5 nm utilisant la technologie de la nanoimpression qui peut \u00eatre utilis\u00e9e jusqu'\u00e0 2 nm.","og_url":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/posts\/434554\/","og_site_name":"EENewsEurope","article_published_time":"2023-10-16T15:33:00+00:00","article_modified_time":"2023-10-16T15:35:11+00:00","og_image":[{"width":600,"height":450,"url":"https:\/\/www.eenewseurope.com\/wp-content\/uploads\/2023\/10\/Canon-1200nz2c-2.jpg","type":"image\/jpeg"}],"author":"Nick Flaherty, A Delapalisse","twitter_card":"summary_large_image","twitter_misc":{"Written by":"A Delapalisse","Est. reading time":"2 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/#article","isPartOf":{"@id":"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/"},"author":{"name":"A Delapalisse","@id":"https:\/\/www.ecinews.fr\/fr\/#\/schema\/person\/0aa2cfb0bd8949724a68cbac8d8321b4"},"headline":"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm","datePublished":"2023-10-16T15:33:00+00:00","dateModified":"2023-10-16T15:35:11+00:00","mainEntityOfPage":{"@id":"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/"},"wordCount":468,"publisher":{"@id":"https:\/\/www.ecinews.fr\/fr\/#organization"},"keywords":["2nm","5nm","EUV"],"articleSection":["Technologies"],"inLanguage":"fr-FR"},{"@type":"WebPage","@id":"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/","url":"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/","name":"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm -","isPartOf":{"@id":"https:\/\/www.ecinews.fr\/fr\/#website"},"datePublished":"2023-10-16T15:33:00+00:00","dateModified":"2023-10-16T15:35:11+00:00","description":"Canon a lanc\u00e9 un syst\u00e8me de lithographie pour 5 nm utilisant la technologie de la nanoimpression qui peut \u00eatre utilis\u00e9e jusqu'\u00e0 2 nm.","breadcrumb":{"@id":"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/#breadcrumb"},"inLanguage":"fr-FR","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/www.eenewseurope.com\/fr\/canon-mise-sur-la-nano-impression-pour-la-lithographie-a-2-nm\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.ecinews.fr\/fr\/"},{"@type":"ListItem","position":2,"name":"Canon mise sur la nano-impression pour la lithographie \u00e0 2 nm"}]},{"@type":"WebSite","@id":"https:\/\/www.ecinews.fr\/fr\/#website","url":"https:\/\/www.ecinews.fr\/fr\/","name":"EENewsEurope","description":"Just another WordPress site","publisher":{"@id":"https:\/\/www.ecinews.fr\/fr\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.ecinews.fr\/fr\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"fr-FR"},{"@type":"Organization","@id":"https:\/\/www.ecinews.fr\/fr\/#organization","name":"EENewsEurope","url":"https:\/\/www.ecinews.fr\/fr\/","logo":{"@type":"ImageObject","inLanguage":"fr-FR","@id":"https:\/\/www.ecinews.fr\/fr\/#\/schema\/logo\/image\/","url":"https:\/\/www.ecinews.fr\/wp-content\/uploads\/2022\/02\/logo-1.jpg","contentUrl":"https:\/\/www.ecinews.fr\/wp-content\/uploads\/2022\/02\/logo-1.jpg","width":283,"height":113,"caption":"EENewsEurope"},"image":{"@id":"https:\/\/www.ecinews.fr\/fr\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.ecinews.fr\/fr\/#\/schema\/person\/0aa2cfb0bd8949724a68cbac8d8321b4","name":"A Delapalisse","image":{"@type":"ImageObject","inLanguage":"fr-FR","@id":"https:\/\/www.ecinews.fr\/fr\/#\/schema\/person\/image\/211ac42237c2e9683c0964086c393cb4","url":"https:\/\/secure.gravatar.com\/avatar\/ad45a8c5da24bc9c7c4940dd1c48a695?s=96&d=mm&r=g","contentUrl":"https:\/\/secure.gravatar.com\/avatar\/ad45a8c5da24bc9c7c4940dd1c48a695?s=96&d=mm&r=g","caption":"A Delapalisse"},"sameAs":["http:\/\/ECI"]}]}},"authors":[{"term_id":3640,"user_id":0,"is_guest":1,"slug":"nick-flaherty","display_name":"Nick Flaherty","avatar_url":"https:\/\/secure.gravatar.com\/avatar\/?s=96&d=mm&r=g","0":null,"1":"","2":"","3":"","4":"","5":"","6":"","7":"","8":""},{"term_id":1153,"user_id":34,"is_guest":0,"slug":"adelapalisse","display_name":"A Delapalisse","avatar_url":"https:\/\/secure.gravatar.com\/avatar\/ad45a8c5da24bc9c7c4940dd1c48a695?s=96&d=mm&r=g","0":null,"1":"","2":"","3":"","4":"","5":"","6":"","7":"","8":""}],"_links":{"self":[{"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/posts\/434554"}],"collection":[{"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/users\/34"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/comments?post=434554"}],"version-history":[{"count":0,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/posts\/434554\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/media\/434540"}],"wp:attachment":[{"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/media?parent=434554"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/categories?post=434554"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/tags?post=434554"},{"taxonomy":"domains","embeddable":true,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/domains?post=434554"},{"taxonomy":"author","embeddable":true,"href":"https:\/\/www.ecinews.fr\/fr\/wp-json\/wp\/v2\/ppma_author?post=434554"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}